| Type: | Package |
| Title: | Imports Recipe and Log Files from Angstrom Engineering Thermal Evaporator |
| Version: | 0.2.3 |
| Author: | Thomas Gredig 
[aut, cre, cph] |
| Maintainer: | Thomas Gredig <tgredig@csulb.edu> |
| Description: | Imports and parses recipe and log files generated by Angstrom Engineering thermal evaporation systems. These files contain time-series measurements and process metadata, including chamber pressure, source activity, deposition rate, film thickness, tooling parameters, substrate conditions, and related deposition variables. The package provides functions to extract, organize, and summarize process information in a compact format suitable for data analysis, visualization, and quality control workflows. |
| License: | GPL (≥ 3) |
| BugReports: | https://github.com/thomasgredig/angstromATE/issues |
| Encoding: | UTF-8 |
| Imports: | stringr, utils, xml2 |
| Suggests: | testthat (≥ 3.0.0) |
| Config/testthat/edition: | 3 |
| Config/roxygen2/version: | 8.1.0 |
| URL: | https://github.com/thomasgredig/angstromATE |
| NeedsCompilation: | no |
| Packaged: | 2026-09-24 20:11:42 UTC; gredigcsulb |
| Repository: | CRAN |
| Date/Publication: | 2026-09-24 20:30:02 UTC |
ATE Deposition Summary
Description
Reads an XML Status file from the ATE thermal evaporator and returns the procedural timeline.
Usage
ATE.complete(filename, summaryOnly = FALSE)
Arguments
filename |
XML Status file from Angstrom Thermal Evaporator |
summaryOnly |
logical, if |
Details
Extracts information about the deposition thickness from the completed status XML file at the end of the deposition.
Value
deposition thickness, rate, ramping times, and actions
Author(s)
Thomas Gredig
Examples
fileName <- ATE.sampleFiles('_Complete_')
ATE.complete(fileName, TRUE)
ATE.complete(fileName)
Imports Angstrom Engineering Thermal Evaporator Log Data
Description
Imports Angstrom Engineering Thermal Evaporator Log Data
Usage
ATE.import(filename)
Arguments
filename |
CSV filename including path for the ATE log file |
Value
data frame with around 50 variables and rows that represent time; the variables include Date, Time, SubstrateShutterOpen, ChamberPressure and many other parameters.
Author(s)
Thomas Gredig
Examples
fileName = ATE.sampleFiles("csv")[1]
d = ATE.import(fileName)
head(d)
Basic Information from Thermal Evaporator Deposition
Description
Imports data from the CSV log file of an Angstrom Engineering Thermal Evaporator. It extracts information during the deposition; i.e. while the shutter is open. It returns a condensed version of the deposition parameters.
Usage
ATE.info(filename, verbose = FALSE)
Arguments
filename |
full path of ATE Log file |
verbose |
set to TRUE to get additional information |
Value
list with information during the deposition that includes the thickness, the deposition time in seconds, the starting date, the substrate heater temperature, the material deposition temperature, tooling factor, base pressure, the pressure at start of the deposition, maximum pressure, and the material name
Author(s)
Thomas Gredig
See Also
[ATE.import()]
Examples
fileName = ATE.sampleFiles("csv")[1]
d = ATE.info(fileName,TRUE)
head(d)
Read an ATE .rcp recipe file
Description
Reads an XML-based ATE '.rcp' recipe file and extracts deposition-relevant parameters into a data frame. The returned table contains one row per '"Deposit Rate"' action in the recipe, preserving recipe order.
Usage
ATE.readRecipe(filename)
Arguments
filename |
Character string. Path to the '.rcp' XML recipe file. |
Details
For each deposition action, the function reports the source name, the first chamber pressure set point encountered before or within the recipe, the most recent substrate temperature ramp set point before deposition, the target deposition rate, timeout, and target thickness.
XML namespaces are ignored when matching element names.
Source names are resolved by matching each deposition action's 'RecipeSourceID' to the corresponding 'RecipeSource' entry.
The substrate temperature is inferred from the last preceding '"Ramp Temperature"' action. The function tries the following XML field names, in order, and returns the first numeric value found: 'TemperatureSetpoint', 'TargetTemperature', 'Temperature', and 'Setpoint'.
Value
A 'data.frame' with columns:
- source_name
Name of the recipe source used for the deposition action.
- pre_vacuum_pressure
First chamber pressure set point from a '"Wait for Chamber Pressure"' action.
- last_substrate_temperature
Most recent substrate temperature ramp target or set point before the deposition action.
- deposition_rate
Target deposition rate from the '"Deposit Rate"' action.
- deposition_time
Timeout value from the '"Deposit Rate"' action.
- thickness
Target thickness from the '"Deposit Rate"' action.
If no deposition actions are found, a one-row data frame is returned with 'NA' values for deposition-specific fields.
Examples
## Not run:
recipe <- ATE.readRecipe("my_recipe.rcp")
recipe
## End(Not run)
Sample ATE file list
Description
Returns a list of sample thermal evaporator log files, mostly for testing.
Usage
ATE.sampleFiles(filePattern = "*")
Arguments
filePattern |
pattern to limit the files |
Value
list of sample data files with log information
Examples
ATE.sampleFiles()
ATE.sampleFiles('_Status')
ATE Recipe Status
Description
Reads an XML Status file from the ATE thermal evaporator and returns the procedural timeline.
Usage
ATE.status(filename)
Arguments
filename |
path and filename of XML Status file from Angstrom Thermal Evaporator |
Value
data frame with description steps, start and end times
Author(s)
Thomas Gredig
Examples
fileName <- ATE.sampleFiles('_Status')
ATE.status(fileName)
Convert Time String to Numeric
Description
Convert Time String to Numeric
Usage
conv2seconds(strTime)
Arguments
strTime |
a string with time |
Value
a numeric value in units of seconds
Author(s)
Thomas Gredig
Examples
conv2seconds("00:35:40.1816298")
conv2seconds("00:35:40.1816298") - conv2seconds("00:36:40.1816298")
conv2seconds("1.19:07:06.5180408")